Amorphous insulating MoS films deposited by magnetron sputtering as a low-index optical coating
In the authors' words
While much effort are now concentrated on exploration of crystalline form of MoS as a two-dimensional material, we show that room-temperature DC magnetron sputtering from pressurized MoS powder target produces amorphous MoS films with optical properties fundamentally different from those of crystalline MoS. The films were found to have a sulfur content of approximately , indicating sulfur deficiency. They are optically isotropic and exhibit rather low optical losses, with a refractive index of about 2 over the visible and near-infrared spectral range. Their compatibility with lift-off lithography and dry etching makes amorphous MoS a promising material for integrated photonic applications.
Appeared: Tuesday, September 22. arXiv. Preprint, not yet peer-reviewed.
Authors' comment: 6 pages, 5 figures